Coaxial Cable Based Magnetic and Electric Near-Field Probes to Measure On-Chip Components up to 330 GHz

This article presents miniaturized near-field probes to characterize the electric and magnetic fields in WR03 waveguide band ( $\mathbf \mathrm{GHz}$ ) on-chip. The are based on a commercially available coaxial cable which enables construction of both open- short-circuited measure field components, respectively. Furthermore, it is flexible enough not damage wafer under test or GSG on-wafer probe contacting chip. It shown that measured near enable physical insight into operation chip, also eases fault detection search for error sources. Last, above chip can be used calculate far antenna. Here, usually disturbing influence measurement significantly reduced if only dominated by antenna, i.e., close proximity measured. With this technique, radiation shadowing mitigated. Compared complex accurate robot solutions necessary spherical coordinates, requires cartesian sampling along surface.